Rare earth iron garnets (REIGs) is a kind of mineral rich in rare earth elements, because of its unique physical and chemical properties, showing great application potential in the field of spintronics and magnetic electrons. Its fast spin wave mechanics, high domain wall velocities, and low to moderate damping properties make it exhibit excellent performance in microwave devices and high-frequency communications [1]. At the same time, rare earth garnet also has good magnetic properties, making it an ideal choice for data storage and magnetic sensors, in the fields of electronics, communications, lasers and data storage. However, voltage-induced anisotropy modulation on rare earth iron garnet films grown on piezoelectric substrates has not been demonstrated.
At present, Miela J. Gross[2] used magnetron sputtering technology to prepare 5nm SiO2 coatings on Si (001) or PMN-PT (011) substrates. Subsequently, the chemical DyIG and YIG targets were successfully co-deposited by pulsed laser deposition (PLD) technology to prepare 42nm thick YDyIG films. Rapid heat treatment (RTP) for 5 minutes at 750℃ O2 atmosphere was carried out to promote the crystallization of the film, thereby improving the order and performance of its garnet structure.